MEMS Pressure Sensors

Assenti is well versed in the art of fabricating both Capacitive and Piezoresistive pressure sensors with various shapes (square and round membranes) and sensitivity ranges.

For size reference, the microfabricated capacitive pressure sensor to the right is resting on a US dime.

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The center is housed within two campus cleanrooms, including a 9,000-sq.-ft., seven-bay, Class 100/1000 facility designed by nationally renowned AGI consultants.
Our wide variety of micro/nanoprocessing tools and 10-plus years of operating experience make our state-of-the-art facilities popular not only with researchers at UofL and other universities throughout the Ohio Valley region, but with industry and government laboratories nationwide, too.