Metrology & Test

White Light Interferometer Surface Profiling:

Veeco Interferometer provides high resolution, 3D surface measurements, from subnanometer roughness to millimeter step heights for all reflective substrates.

3-D Contact Profiling:

Veeco Dektak 8 provides down to 7.5 angstrom step height measurements with a vertical range up to 1mm and a maximum scan length of 200 mm. Low stylus forces allow scratch-free measurement of soft materials.

Ellipsometry:

Nondestructive measurement technique for determining the thickness and optical constants of single and multilayer films.

SEM, AFM, STM Capabilites:

Various SEMs, AFMs and STMs including nm resolution e-beam lithography.

Testing:

Various probe stations and electronic instruments for measuring sheet resistance, TCR, IV, CV, LCR and other semiconductor parameters.

Return to Products and Services Page

The center is housed within two campus cleanrooms, including a 9,000-sq.-ft., seven-bay, Class 100/1000 facility designed by nationally renowned AGI consultants.
Our wide variety of micro/nanoprocessing tools and 10-plus years of operating experience make our state-of-the-art facilities popular not only with researchers at UofL and other universities throughout the Ohio Valley region, but with industry and government laboratories nationwide, too.